Reproducible RSM process-window analysis for a public silicon plasma-etch DOE
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Updated
Sep 8, 2026 - Python
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plasma-etch
Here are 3 public repositories matching this topic...
SiO₂ Dry Etch 공정 AI 예측 대시보드 — TCAD 가상공정 데이터를 학습한 surrogate로 Etch Rate·Profile·Undercut을 즉시 예측하고 Spec 만족 공정영역을 탐색. 설치 불필요 웹 데모 제공.
machine-learning process-simulation semiconductor tcad surrogate-model dry-etch streamlit process-ai plasma-etch
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Aug 29, 2026 - Python
Tool-health monitoring for plasma etch telemetry. Spring Boot, PostgreSQL, React.
react java typescript spring-boot time-series postgresql semiconductor anomaly-detection plasma-etch
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Updated
Sep 23, 2026 - Java
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